Microprocessor controller for EL-1 ID ellipsometer

Jerzy Kotliński

Abstract


The purpose of the microprocessor - based controller described in the present study is to enable the measurements by means of EL-1 ID ellipsometer system to be carried in automatic mode. The geometry of optic components of the ellipsometer system can be changed in MANUAL and AUTOMATIC modes by means of the controller. Three keys incorporated on the front panel are used for setting of the ellipsometer in MANUAL mode. The controller management in AUTOMATIC mode is possible via serial transmission link from any IBM personal computer.

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DOI: http://dx.doi.org/10.17951/ai.2005.3.1.253-261
Date of publication: 2015-01-04 00:00:00
Date of submission: 2016-04-27 10:14:26


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